| 摘要 |
PURPOSE:To effectively absorb a member to be absorbed to an absorbing substrate by containing a mechanism for holding the substrate at a higher temperature than a room temperature to prevent moisture in the air from being absorbed to the absorbing surface of the substrate. CONSTITUTION:Electrodes 2 are provided near the absorbing surface 1a of an absorbing substrate 1, and a DC voltage is applied thereto by a DC power source 3. Further, in order to hold the substrate 1 at higher temperature than an environmental temperature, a water guide passage 4 for passing hot water is provided in the substrate 1 to always feed the higher temperature water than the room temperature. Since the substrate 1 is heated by the hot water in this manner, moisture in the air is condensed on the absorbing surface 1a to form electrodes 2 and a capacitor, an absorbing force is acted therebetween to prevent an absorbing force from not acting on a member 5 to be absorbed, e.g., a semiconductor wafer 7. |
