| 摘要 |
PURPOSE:To prevent a cable from being disconnected due to roundabout arrangement of the cable for driving a marker by providing the connector of the cable for driving the marker in a head plate or a card holder for mounting a probe card. CONSTITUTION:A marker 4 is secured through a card holder 7 to a head plate 5, and a marker driving cable 3 extended from a marker 4 is connected to a marker connector 2 mounted on the plate 5. The end of the connector 2 is connected to a circuit for driving the marker through the interior of the plate 5. That is, since the connector 2 of the cable 3 is mounted in the plate 5, i.e., on the face of the plate 5 opposed to the inner marker 4, the roundabout arrangement of the cable on the wafer prober body and the projection of the connector are eliminated, and the upper surface of the body becomes flat. Accordingly, an HF head can be plated on the upper surface of the body without fail. Thus, it can suppress defects, such as the disconnection of the cable due to the roundabout arrangement of the cable.
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