| 摘要 |
PURPOSE:To prevent the occurrence of the defective trimming even in the case of supplying a sample automatically by measuring laser output in the course of the laser beam trimming and correcting the laser output in the case there is the difference between this measured output value and a desired output value. CONSTITUTION:A half mirror 4 is provided on the way of an optical path from a laser beam oscillator 3 to a laser beam positioner 9 and a transmitted laser beam 6 is projected on a laser beam measuring instrument 7. Then, a measurement control part 7a of the laser beam measuring instrument 7 takes out the laser output value of the measuring instrument 7 and a laser control part 8 compares this laser output value with the desired laser output data 15 and a power source control part 2 is controlled so that the difference is made to '0' to adjust the laser output from the oscillator 3. Accordingly, even in the case of supplying the sample automatically by an auto-handler, etc., the occurrence of the defective trimming such as the defective cutting, etc., can be prevented. |
