发明名称 PATTERN DETECTOR
摘要 PURPOSE:To accurately detect even a pattern which has a high light reflection factor by arranging a linear light shield body newly at a position corresponding to a black line on the pattern to be detected. CONSTITUTION:Illumination light L which is emitted by a linear light source 2, passed through a 1st linear light shield body 3, and transmitted through a lens 4 for image formation contains light leaking from a light area. Then, the 2nd linear light shield body 9 is provided between the lens 4 for line image formation and a printed board 1 at the position corresponding to the black line B on the board 1 to remove the leaking light, thereby forming a dark black line B which contains almost no leaking light on the pattern to be detected. Therefore, even if the pattern to be detected has a part whose light reflection factor is extremely high, leaking light which is reflected from in the black line B is a little and the detected pattern is every accurate.
申请公布号 JPS63205547(A) 申请公布日期 1988.08.25
申请号 JP19870035890 申请日期 1987.02.20
申请人 FUJITSU LTD 发明人 OKA KOJI;ANDO MORITOSHI
分类号 H01L21/66;G01B11/24;G01N21/84;G01N21/956;H05K3/00 主分类号 H01L21/66
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