MOLECULAR BEAM FLUX MONITOR

摘要

PURPOSE:To prevent a substrate holder support from becoming large-sized and complicated, by providing a moving member movable through a gate value held to an open state in the axial direction, a monitor detection part and a moving mechanism for moving the moving member in a vacuum state. CONSTITUTION:A substrate irradiated with molecular beam 2 is arranged in a vacuum chamber 8 and molecular beam sources 2 irradiating the substrate 1 with molecular beam are arranged therein. A cylindrical housing 9 is connected to the chamber 8 through a gate valve 6 and a support rod 10 movable in the axial direction through the gate valve 6 held to an open state is arranged in the housing 9. A monitor detection part 3 is provided to the leading end part of said rod 10 and a magnetic coupling mechanism 5 is further provided as the driver mechanism of the rod 10. This coupling mechanism 5 is constituted of the internal magnet fixed to the other end in the housing 9 of the rod 10 and movable in a housing 9 in the axial direction of the rod 10, and an external magnet magnetically coupled with the magnet provided to the rod 10 and movable outside the housing 9 in the axial direction of the rod 10.