| 摘要 |
PURPOSE:To obtain a good reflectivity and scattering ratio by forming a titled mirror in such a manner that free carbon is not substantially admitted in Raman spectra using argon as an excitation source and ratio of Si:C is specified substantially to 1:1. CONSTITUTION:A member constituted by forming an SiC film 2 on a base material 1 is so formed that the free carbon is not substantially admitted in the Raman spectra of the laser using the argon as the excitation source and the ratio of Si:C is specified substantially to 1:1. More preferably, the crystal grain size is specified to <=10mum. The mirror is the film which does not contain the free carbon and has the high crystallinity of 1:1 in Si:C in such a manner and since the crystal is as fine as <=10mum, the polishing thereof is extremely easy and the good final finish is obtd. The good reflectivity and scattering ratio are thereby obtd.
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