| 摘要 |
PURPOSE:To obtain a current Auger electron image by constituting a titled device in such a manner that an Auger electron detection signal is standardized by the signal detected by a reflected electron detector and said signal is introduced to a display device to observe the Auger electron image of a sample. CONSTITUTION:A scanning signal generator 9 supplies two-dimensional scanning signals to deflectors 8x, 8y and supplies the synchronized signals to deflectors 11x, 11y of a display device 10 as well. The reflected electron detector 12 is disposed between an incident slit 5a of a cylindrical mirror analyzer 3a and the sample 2. The detection signal of the detector 12 is supplied as a signal Sb via an amplifier 13 to a divider 14. On the other hand, the signal Sb of an Auger electron detector 6 is supplied to a divider 14 as well by which a signal ratio Sa/Sb is determined. The signals determined in such a manner are supplied as signals for modulating luminance of a device 10. The signal which is canceled in a surface shape effect is obtd. when the signal Sa is divided by Sb. The signal standardized by the signal of the reflected electrons is introduced as a luminance signal to the device 10, by which the correct Auger electron image is obtd. |
