| 摘要 |
PURPOSE:To enable the delivery to be confirmed automatically by means of reading up difference in values indicated by a thermocouple for monitoring temperature attached to a wafer heater. CONSTITUTION:When a wafer 1 delivered to a fork 2 is heated, a thermocouple 7 indicates a specified value while indicating another value if there is no wafer 1 on the fork 2 due to failure of wafer delivery. When the wafer 1 is on the fork 2, a wafer heater 6 is heated by radient heat of wafer 1 up to higher temperature than that in case of no wafer 1 on the fork 2. The indicated values in the thermocouple 7 in case there is a wafer or not on the fork 2 are previously specified to be inputted to a program. Through these procedures, the existance of wafer 1 can be confirmed automatically by means of reading up the value indicated by thermocouple 7 to compare it with specified value inputted to the program. |
