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发明名称
VERFAHREN ZUR FLUESSIGPHASENEPITAXIE VON MEHRSCHICHTSTRUKTUREN
摘要
申请公布号
DD259425(A1)
申请公布日期
1988.08.24
申请号
DD19870301306
申请日期
1987.03.31
申请人
VEB WERK FUER FERNSEHELEKTRONIK,DD
发明人
JACOBS,BRIGITTE,DD;HUMENIUK,MICHAEL,DD
分类号
C30B19/00;H01L21/208;(IPC1-7):C30B19/00
主分类号
C30B19/00
代理机构
代理人
主权项
地址
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