| 摘要 |
PURPOSE:To miniaturize a sputter ion pump as well as to secure a high vacuum chamber, by forming a cathodic electrode and an anodic electrode both into ring form, while forming a permanent magnet into ring form as well, and setting the center and its vicinity of a vacuum vessel down to an exhausted space. CONSTITUTION:A vacuum vessel 1 is formed into cylindrical form, and cathodic electrodes 2 and 3 and an anodic electrode 4 are all formed into ring form so as to be housed inside this vacuum vessel. Corresponding to form of these cathodic electrodes 2 and 3 and the anodic electrode 4, permanent magnets 5 and 6 are formed into ring form as well. The center and its vicinity of this cylindrical vacuum vessel 1 is set down to an exhausted space. Evacuation is carried out by ion pump action and chemisorption action. Thus, a high vacuum is realizable with a small device.
|
