发明名称 TACKY SHEET FOR STICKING STICK WAFER
摘要 PURPOSE:To obtain the title sheet which will not cause the clogging of a cutting blade even when cut off by the full cut method and therefore will not shorten the life of a cutting blade, by either forming a tacky layer is which specified abrasive grains have been dispersed on a base material by coating, or providing an abrasive grain layer containing the said abrasive grains between a base material and a tacky layer. CONSTITUTION:A tacky layer 3 is formed on a base material 2 comprising a film of synthetic resin, such as PE, PP or PVC, by applying a tacky composition prepared by dispersing abrasive grains 4 having a particle diameter of 0.5-100mum and a Mohs hardness of 6-10 in a Tacky adhesive comprising 10-90pts.wt. acrylic tackifier having an average molecular weight of 5.0X10<4>-10.0X10<5> and, as required, 90-10pts.wt. radiation-polymerizable compound, such as a urethane acrylate oligomer, to the base material 2, thus giving the title sheet 1. Optionally, an acrylic tacky layer 3 having, if required, a radiation-polymerizable compound incorporated therein is formed on the base material 2 by coating, with an abrasive grain layer 5 of a thickness of 1-150mum containing 10-100wt.% aforementioned abrasive grains 4 lying therebetween, giving the title sheet.
申请公布号 JPS63205383(A) 申请公布日期 1988.08.24
申请号 JP19870037429 申请日期 1987.02.20
申请人 F S K KK 发明人 EBE KAZUYOSHI;NARITA HIROAKI;TAGUCHI KATSUHISA;AKEDA YOSHITAKA;SAITO TAKANORI
分类号 H01L21/301;C09J7/02;H01L21/68;H01L21/683;H01L21/78 主分类号 H01L21/301
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