| 摘要 |
PURPOSE:To achieve a higher accuracy in the detection of a possible fault of a test semiconductor element while under a test, by connecting a recorder in series to an aging substrate with the test semiconductor mounted thereon and a power source unit. CONSTITUTION:A tester 7 having not only a current monitoring function but also a time monitoring function and an electric stress monitoring function is connected in series to an aging substrate 2 with a test semiconductor mounted thereon and a power source unit 3 and the aging substrate 2 is dumped into a test tank 5 to perform a test. With such an arrangement, it is possible to determine elapsed time and other test conditions necessary for post processing such as analysis as well when the test semiconductor element fails easily and accurately while under a test. When the power source unit 3, the test tank 5 and the recorder 7 are so arranged to be managed in package by control with an external computer, a reliability evaluation test of the semiconductor element can be further made quicker along with a greater saving labor.
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