Piezoelectric servomechanism apparatus

摘要

A floating plate is provided in a cylinder chamber and slides freely like a piston. A first group of laminated, ring-shaped, thin-plate piezoelectric elements is provided between a fixed support member provided on part of a wall portion of this cylinder chamber and the floating plate. A second group of laminated, cylindrical, thin-plate piezoelectric elements is provided in the center of the first group and a working member is provided on the free end of the second group of elements that is not attached to the floating plate. A hydraulic chamber is formed in the cylinder chamber on the side of the floating plate opposite to the side on which the first and second groups of elements are provided, and the pressure in this hydraulic chamber pushes the floating plate in the direction of the fixed support member. Voltage is applied to the first and second groups of elements to expand and contract them thereby varying the distance between the floating plate and the fixed support member and varying the distance between the floating plate and the working member.