发明名称 |
Method of inspecting a master member |
摘要 |
A method of inspecting a pattern of elements on a working plate includes producing a negative copy of the working plate and aligning the negative copy with a positive inspection plate having elements slightly larger than the elements of the working plate whereby flaws are revealed as light transmissive spots. The working plate and a negative inspection plate, having the elements slightly smaller than the elements of the working plate, are aligned and flaws are revealed as light transmissive spots.
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申请公布号 |
US4765743(A) |
申请公布日期 |
1988.08.23 |
申请号 |
US19870024219 |
申请日期 |
1987.03.10 |
申请人 |
RCA LICENSING CORPORATION |
发明人 |
KRUFKA, FRANK S.;WETZEL, CHARLES M. |
分类号 |
G01N21/88;(IPC1-7):G01B11/00 |
主分类号 |
G01N21/88 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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