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发明名称
PLASMA ETCHING
摘要
申请公布号
JPS63202919(A)
申请公布日期
1988.08.22
申请号
JP19870319136
申请日期
1987.12.18
申请人
INTERNATL BUSINESS MACH CORP <IBM>
发明人
FURANKU DANIERU EIJITO;UORUTAA EEJIYAN MURINKO
分类号
H01L21/302;H01L21/3065;H01L21/311;H05K3/00
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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