| 摘要 |
<p>PURPOSE:To enable optional thrusting by providing a processing object throw-in station and a carry-out station for a wafer carrier and their control device in the thrusting system into a semiconductor wafer processing device. CONSTITUTION:During the operation of an automatic conveying system, when a wafer carrier 22 is set on a processing object throw-in station 18, the processing information on the wafer carrier 22 is inputted into the electronic control device 20 of an automatic cleaning device 13. Thereby, it is selected whether the wafer carrier 22 which is set on the processing object throw-in station 18 is conveyed to an empty station 15 by a conveying robot 14 to carry out an ordinary processing and, then, sent to the following process or it is conveyed to a processing part 16 for processing and, then, conveyed to a carry- out station 19. And, the carrier 22 is conveyed from the carry-out station 19 to the following process by means of an electronic control device 20. This structure enables optional thrusting.</p> |
