| 摘要 |
PURPOSE:To prevent the generation of fine dust, by levitating, in a supporting structure, a conveyor table member supporting a conveyed article through a magnetic force of magnetic levitation means. CONSTITUTION:If a power is applied to electromagnets 40-43 provided on the inside of supporting structures 32, 33 in the manner of opposing the peripheral face of a conveyor table member 35, said conveyor table member 35 levitates on the inside of said supporting structures 32, 33 so that the tip faces of said electromagnets form preset equal spaces from the peripheral face of the conveyor table member 35. Also, if a power is applied to electromagnets 44, 45, tip faces of said electromagnets form preset equal spaces from a leg plate 37 to control the conveyor table member 35 in such manner that said member does not rotate on its axis on the inside of the supporting structures 32, 33. Then, in a state where the conveyor table member 35 is levitated magnetically, a linear motor 38 is operated and the conveyor table member 35 is caused to move in its axial direction.
|
