| 摘要 |
PURPOSE:To inhibit the formation of by-products and to obtain the titled high- purity product with good yield at low cost by suspending a fluorinating agent in a specified solvent and thereafter adding a partially chlorinated silane thereto and allowing them to react with each other. CONSTITUTION:A fluorinating agent being metallic such as (B) SbF3, AsF3, TiF4, SnF4, CuF2 and ZnF2 is suspended in a solvent (C) shown in a formula I (n=3-8) which is low in solubility for the component B and an obtained product and high in solubility for both the following component a and metallic chloride formed by reaction and is sufficiently removed from water content. Then a partially chlorinated silane (A) shown in a formula II (x=1-3) is added thereto and these are allowed to react with each other mildly and completely at -10-40 deg.C to obtain the titled product.
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