| 摘要 |
PURPOSE:To enhance adhesiveness of a mesh to a photosensitive resin and mechanical strength of the mesh, by subjecting a polyester mesh to a low-temperature plasma treatment through using an inorganic gas having an ionization energy of not less than a specified value and specifying the pressure, a high-frequency electric power applied to an input-side electrode and an applied discharge energy. CONSTITUTION:A mesh for screen printing is produced by subjecting a polyester mesh to a low-temperature plasma treatment through using an inorganic gas having an ionization energy of not less than 15eV under the conditions of a pressure of 0.001-10Torr, a high-frequency electric power applied to an input-side electrode of not more than 150kW/m<2> and an applied discharge energy of 10-1,000kW.S/m<2>. If the power applied across the electrodes is excessively high, the material being treated is decomposed or deteriorated, causing a decrease in the strength of the mesh. Therefore, the power applied across the electrodes is controlled to or below 150kW/m<2> per area of the anode. The inorganic gas may be He, Ne, Ar, H2, N2 or the like. An inorganic gas having an ionization energy of less than 15eV, such as O2, air, CO and CO2, is liable to cause excessive etching of the surface of the mesh, leading to a decrease in the strength of the mesh. |
