| 摘要 |
PURPOSE:To improve the detection sensitivity of an optical image sensor by arranging a plurality of contacts on a substrate, and forming a superconducting thin film between the contacts. CONSTITUTION:Contact circuits 11-13 are formed on an insulating substrate 10, and a contact circuit 16 is then formed. In this case, insulating layers 21-23 are so formed on the circuits 11-13 as not to electrically conduct between the circuits 11-13 and 16. Contacts 16a-16d are formed at predetermined positions on the circuit 16, and an insulating layer 26 is formed on the circuit 16 except the parts of the contacts 16a-16d. Then, a superconducting thin film 20 which has superconducting critical temperature of 20K or higher and performs a grain boundary Josephson effect is formed thereon to become an optical image sensor. According to the thus configuration, remarkably high detection sensitivity can be obtained due to multi-effects of multiplex bonding of the Josephson junction. |
