| 摘要 |
PURPOSE:To make it possible to continuously generate an electron beam as long as source gas is supplied by emitting electrons through gas ionization to take out the emitted electrons through an orifice by means of an electron beam taking-out electrode. CONSTITUTION:Source gas, for instance, argon gas is supplied to a plasma generating chamber 3 through a tube line 6 for holding a pressure in the plasma generating chamber 3 at about 5X10<-2> Pa. A microwave is made incident on this plasma generation chamber 3 through a wave guide 1 for ionizing argon gas. Ar<+> ions, Ar atoms and electrons are contained in a plasma generated in the plasma generating chamber 3 and an electron beam taking-out electrode 5 has positive potential to the plasma generating chamber 3. Electrons in the plasma are taken out by the electron beam taking-out electrode 5 through an orifice 4, as a result, the electron beam is generated. The electron beam can be continuously generated by supplying source gas continuously.
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