发明名称 CMOS SEMICONDUCTOR DEVICE
摘要 PURPOSE:To suppress the latchup of an FET by providing the same conductivity type high concentration regions in a predetermined well directly under a gate electrode wiring layer, and superposing a guard band region formed in a self- alignment to eliminate the separation of the guard band. CONSTITUTION:A CMOS inverter is formed of a P-well 1, N-well 2, a gate electrode wiring layer 4, P-type drain, source regions 5, 6, and N-type drain, source regions 7, 8. An N-type diffused layer 10 is formed as the same conductivity type high concentration region as the well in a predetermined well 2 directly under the layer 4 of this configuration. The layer 10 as the high concentration region is superposed on the region of the same conductivity type guard band 3 disposed in the well to eliminate the separation of the band 3, thereby suppressing a chargeup.
申请公布号 JPS63200560(A) 申请公布日期 1988.08.18
申请号 JP19870033857 申请日期 1987.02.17
申请人 MATSUSHITA ELECTRONICS CORP 发明人 NAKANE JOJI;TANIGUCHI TAKASHI;HIRANO HIROSHIGE;SUMI TATSUMI;KISHIMOTO MIKIO;KURIYAMA HIROKO;TERAKAWA SUMIO
分类号 H01L29/78;H01L27/08;H01L27/092 主分类号 H01L29/78
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