| 摘要 |
PURPOSE:To measure the quantity of positional displacement with high precision by scanning only in one direction by SEM, etc., while reducing the measuring time and the number of processes by using a mark having a shape capable of being predicted or calculated by scanning only in one direction as a mark for measuring positional displacement. CONSTITUTION:A mark, a shape of which can be predicted or calculated from a plurality of intersection data acquired by scanning only in one direction and which includes a curve section having a reference point capable of being univocally determined from the shape, is employed as a mark for measuring positional displacement. When two circles R1, R2 having different diameters are used as the patterns for measuring positional displacement and scanned in the lateral direction on the picture plane by SEM, signals of four in total corresponding to the edge sections or intersection sections 1, 4 and 2, 3 of the circle (an external circle) R1 on the outside and the circle (an internal circle) R2 on the inside are acquired. When such scanning is conducted a plurality of times and an approximate curve passing through points shown by these data is formed, the central coordinates of the external circle and the internal circle are obtained regarding each of the external circle R1 and the internal circle R2, and the quantity of the positional displacement of the two circles is acquired.
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