| 摘要 |
PURPOSE:To let standard particles with a definite particle-size distribution adhere to a mirror-finished specimen wafer with good accuracy by a method wherein the standard particles are dispersed in a solvent and they are made to adhere to the wafer by electrophoresis. CONSTITUTION:A solution 1 in which standard particles are dispersed is poured into an electrophoresis vessel; an electrode 4 which is connected to the negative pole of a power supply 3 situated outside the vessel is immersed in the solution in such a way that it is situated to be face to face with a mirror-finished water 5 and an electrode 6 which is connected to the positive pole of the power supply 3. If an electric current is sent by the power supply 3 in this state, the standard particles 8,... which are dispersed in the solution 1, are guided by an electric field which is generated between the electrodes 4, 6 as shown by dashed lines 7,...; they are attracted onto the opposed mirror surface of the wafer 5 and adhere to the surface. By this setup, it is possible to obtain the specimen wafer 5 to which homogeneous particles have adhered.
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