| 摘要 |
PURPOSE:To enable smooth absorption of linear expansion in an inner tube made of ceramics and to realize simplification and miniaturization in structure of this oscillating tube, by installing supply pipes, through which cooling water is supplied to cooling water channels disposed on the peripheral parts of O rings, and drain pipes, through which the cooling water is discharged to the cooling water channels, and by making at least one part of the supply pipes and the drain pipes be composed of a bellows tube. CONSTITUTION:An inner tube 1 made of ceramics, in which metallic particles 8 are housed, is supported at an outer tube 14 through O rings 12 and bellows 13, and is supplied with a buffer gas for discharge. Discharge plasma is formed to vaporize the metallic particles 8 by applying a high voltage across an anode 5 and a cathode 6, which are installed on both ends of the inner tube, so that the vaporized metallic particles are excited by free electrons in the discharge plasma and laser oscillation is performed. In such a metallic vapor laser oscillating tube, supply pipes 19, through which cooling water is supplied to cooling water channels 20 disposed on the peripheral parts of the O rings 12, and drain pipes 21, through which the cooling water is discharged from the cooling water channels, are installed. At least one part of the supply pipes and the drain pipes is composed of a bellows tube 22. Accordingly, linear expansion due to heat in the inner tube made of ceramics can be absorbed smoothly, so that simplification and miniaturization in structure of this oscillating tube can be realized. |
