| 摘要 |
PURPOSE:To prevent the generation of dust caused by a mechanical friction contact, and to improve the yield of a product by pressing a substrate in a container by a cantilever spring material, and fixing and holding it. CONSTITUTION:In a dust-proof container for housing a substrate of a reticle, a photomask or a wafer, etc., for manufacturing a semiconductor circuit such as an LSI, etc., a cantilever spring member 12 and supporting member 9 for substrate loading use are provided, and a substrate 10 contained in an enclosure 3 is pressed against the supporting member 9 side by those members. In such a way, the substrate 10 contained in the enclosure 3 is usually held by the cantilever spring member 12 and the supporting member 9. In such a way, by providing a substrate pressing means eliminating a mechanical slide-contact, the generation of dust in the container is prevented, and the dust-proof container contriving the improvement of the yield of a semiconductor product is obtained. |
