发明名称 THERMAL TREATMENT DEVICE
摘要 PURPOSE:To reuse nitrogen gas, so far destined to be discarded in quantities when heat treatment is not under way, by a method wherein a mechanism is provided capable of regenerating the gas just out of a heat treatment section and supply it back to the heat treatment section. CONSTITUTION:When heat treatment is not under way, a first valve 8 is opened and a second valve 9 is closed, for the flow of gas from a tube 1 to be switched from an exhaust line 2 to a gas-regenerating line 7. The gas, after passing through the gas-regenerating line 7, is regenerated in a second gas refiner 6. The gas, after passing through an open third valve 10, is into a first gas refiner 4 for further refining. The gas travels through an inlet line 3 and goes into the tube 1. When the entirety of the gas coming out of the tube 1 is to be utilized, a fourth valve 11 and a fifth valve 12 are closed. When only a part of the gas is to be utilized, the fourth valve 11 and the fifth valve 12 are opened. In this way, nitrogen gas, which is being discarded in great quantities in a conventional design when heat treatment is not under way, may now be reused.
申请公布号 JPS63197343(A) 申请公布日期 1988.08.16
申请号 JP19870030354 申请日期 1987.02.12
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 SHITSUPOU OSAMU;HIROFUJI YUICHI
分类号 H01L21/324 主分类号 H01L21/324
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