发明名称 METHOD AND DEVICE FOR MANUFACTURING COMPONENT
摘要 PURPOSE:To decrease defective products in production of ICs by a method wherein static detective sensors are provided with a marking device at points before and behind a part where an IC liable to suffer from static damage, voltage of the charged IC is displayed and the IC found defective owing to static is automatically removed. CONSTITUTION:When an IC 22 is transferred by a rail 20, the charged voltage of the IC 22 is detected by a sensor 25 and outputted into a monitor 29 through the intermediary of a cable 33. Next, marking is performed on a package 23 of the IC 22 by a printing plate 4. A process follows, wherein the charged voltage of the IC 22 is detected by a sensor 27 and outputted into a monitor 29 through the intermediary of a cable 33. The charged voltage of the IC is displayed on level meters 30 and 31 and a buzzer goes if the charged voltage shows more volts than a specified voltage range, when the IC is removed. Therefore a defective IC is not processed and thereby the detective produts decrease.
申请公布号 JPS63197360(A) 申请公布日期 1988.08.16
申请号 JP19870028272 申请日期 1987.02.12
申请人 HITACHI LTD;HITACHI YONEZAWA DENSHI KK 发明人 OGURA TOSHIHIRO;YUKI HIDEYA;NISHIDA SUMIO
分类号 H01L21/66;G01R31/30;H01L23/00 主分类号 H01L21/66
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