| 摘要 |
PURPOSE:To enable to reduce the warpage of a magnetic recording medium by a method wherein the quantity of heat accumulated on a substrate when a film is formed on the first surface of the substrate and the quantity of heat which is accumulated when a film is formed on the second surface are almost equalized. CONSTITUTION:A roll 2, to be used to roll out a substrate 11, and a take-up roll 3 are provided inside a vacuum chamber 1, and substrate supporting electrodes 16-19 and targets 5-9 are arranged between guide rolls 4 and 4'. In order to form a magnetic film on both sides of the substrate 11 using the device, first, the first magnetic film 12 is formed on the first surface of the substrate 11 using the target 5. Subsequently, the first magnetic film 14 is formed on the second surface of the substrate 11 using the target 8. Then, the second magnetic film 15 is formed on said magnetic film 14 using the target 9, and then the second magnetic film 13 is formed on the first surface using the target 6. As a result, the total quantity of heat accumulated on the substrate 11 when a film is formed on the first surface of the substrate 11 and the total quantity of heat accumulate on the substrate can be almost equalized, thereby enabling to manufacture the recording medium having a little warpage. |
