| 摘要 |
PURPOSE:To obtain the desired measurement data by comparing the measured data with the preset reference value and setting the etching time in response to the condition change. CONSTITUTION:The measured value from a detector 4 is compared with the reference value preset from an input section 6 in sequence by a comparing means 7, and the resulting output is fed to a control means 8. Initial conditions such as the first and second etching time E1, E2 corresponding to the case of the rough analysis and the case of the fine analysis respectively and the total etching time are fed to the means 8 from the input section 6. The means 8 selects the time E1 when the measured value is ths reference value or less based on the output of the means 7 and selects the time E2 when the measured value exceeds the reference value to perform the control. The means 7, 8 are realized by a CPU and a memory. Accordingly, the desired measurement data can be obtained.
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