FORMATION OF ORGANIC THIN FILM AND APPARATUS

摘要

PURPOSE:To continuously form an organic thin film which is excellent in adhesion properties on a base plate and smooth in the formation of the organic thin film by an electric field releasing method by successively feeding organic substance of a raw material applied on a long-sized body together with the long-sized body into a heater region. CONSTITUTION:A feed roll 3a and a take-up roll 3b are synchronously driven and a string-shaped body 2 is fed to the region of an emitter 1 at constant velocity. At this time, the region of the emitter 1 serves as a heating region by electric conductive and organic substance (e.g. polyimide or the like) of a raw material put on the string-shaped body 2 is raised at softening temp. thereof or melting temp. or above. On the other hand, an intensive electric field is formed between the emitter 1 and a counter electrode 5 by means of a high-voltage electric source 4. Therefore, organic substance made to a softened state or a melted state is partially ionized by the attraction force of this electric field and flown out and drawn out as fine particles. These fine particles are led on a base plate 6 and deposited thereon and an organic thin film which is excellent in adhesion properties on the base plate and smooth is formed.