| 摘要 |
PURPOSE:To enable high efficiency emission of ultraviolet rays in the wavelength range of 220 nm to 330 nm effective for hardening of a resist by making tin and a specific pressure of xenon gas be sealed in a metallic vapor discharge lamp which is formed by making magnesium and halogen be sealed in a luminous lamp which contains no mercury. CONSTITUTION:In a metallic vapor discharge lamp formed by making magnesium and halogen be sealed in a luminous lamp which contains no mercury, tin and xenon gas of 5 Torr to 300 Torr are sealed. Because mercury is not used in this discharge lamp, output of 350 nm or more is low and ultraviolet rays in the effective wavelength range of 220 nm to 330 nm can be emitted effectively. Further, though magnesium used singly is low in its spectral output, magnesium coexisting with tin and xenon becomes luminous with high efficiency, and the emission amount of ultraviolet rays becomes high in the ultraviolet wavelength range of 220 nm to 330 nm effective for hardening of a resist.
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