摘要 |
PURPOSE:To obtain a gamma-Fe2O3 film having good magnetic performance by controlling the light emission spectral intensity of the target to a prescribed value by introduction of oxygen into the vessel at the time of disposing a nonmagnetic substrate and target essentially consisting of iron in a vessel and executing sputtering in the inert gaseous atmosphere. CONSTITUTION:The substrate 14 consisting of nonmagnetic hard glass is provided to the ceiling of the vessel 1 and the Fe target 16 contg. a slight amt. of Co deposited on a water-cooled support 15 is disposed to face the substrate. A horizontally rotatable shutter 18 is provided therebetween. A peep window is provided to one side wall of the vessel 11 and a spectroscope 22 provided with a photoelectron multiplier and gas flow rate controller in combination is disposed to face the window. The controller is connected with a gaseous oxygen introducing pipe 21 having a valve 23. The device is constituted in such a manner and gaseous Ar is filled in the vessel 11; thereafter, the gaseous oxygen is introduced therein until the light emission intensity attains 60-90% with 100% light emission spectral intensity of Fe. An Fe3O4 film is formed on the substrate 14 and is then subjected to an oxidative heat treatment, by which the gamma-Fe2O3 film is formed.
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