| 摘要 |
PURPOSE:To make it possible to remove dinitrogen difluoride in nitrogen trifluoride gas extremely efficiently, safely and economically, by circulating the nitrogen trifluoride gas through a solid chloride layer at a specific temperature. CONSTITUTION:Nitrogen trifluoride gas is circulated through a solid chloride layer at 150-400 deg.C. All solid chlorides which are stable at circulation temperature and reacted with N2F2 to form fluorides can be used as the solid chloride and CaCl2, MgCl2, BgCl2, SrCl2, NaCl, KCl, LiCl, FeCl3, VCl3, CrCl3, NiCl2, CoCl2, CdCl2, etc., may be cited as the solid chloride. Pressure of the circulating gas is preferably 0-5kg/cm2G because of easy operation.
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