| 摘要 |
PURPOSE:To obtain a silane useful for solar battery, epitaxial film growth, etc., readily, selectively and in high yield, by subjecting a trialkoxysilane to disproportination reaction in the presence of a specific catalyst in a gas phase. CONSTITUTION:A reaction pipe is packed with an oxide of a metal belonging to the third period of the periodic table of element, such as Al2O3, as a catalyst. Then the reaction pipe is heated by a preheater and vapor of a trialkoxysilane (e.g. trimethoxysilane) shown by the formula (R<1-3> are 1-3C alkyl) diluted with helium, etc. Then the reaction pipe is heated to 100-500 deg.C, subjected to gaseous phase disproportination reaction and a silane is recovered from the prepared gaseous reaction mixture.
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