| 摘要 |
PURPOSE:To obtain a thin film magnetic head having excellent magnetic characteristics by subjecting an inter-layer insulating film formed of an inorg. material to precision polishing to eliminate steps and removing the angle parts on the edge face of a return path part by mechanochemical polishing. CONSTITUTION:Grooves 2 are provided on the surface of an Ni-Zn ferrite substrate 1 and glass is packed as a nonmagnetic material 3 therein. After the surface is subjected to the mechanochemical polishing, a thin film conductor coil 4 is sputtered on the surface thereof. SiO2 is then sputtered as the inter- layer insulating film 5 and is subjected to diamond polishing to <=500Angstrom , by which said film is flattened. The return path part 6 is formed thereon. The entire surface is thereafter subjected to the mechanochemical polishing to <=30Angstrom surface roughness. A main magnetic pole 7 and thick-film main magnetic pole 8 consisting of amorphous Co are then sputtered and a protective film 9 consisting of Al2O3 is deposited thereon. Edge rising of the path part 6 is thus eliminated and the thin film head having high efficiency and excellent magnetic characteristics is obtd. |
