| 摘要 |
PURPOSE:To avoid wasting a cleaning liquid and enhance cleaning efficiency, by setting the quantity of the cleaning liquid supplied to be large at the beginning and then gradually reducing the quantity. CONSTITUTION:In a time chart showing a method of supplying a cleaning liquid 21 to manifold nozzles 16 with a cleaning liquid supplying means 20, the abscissa represents time (sec) while the ordinate represents the flow rate (l/min) of the cleaning liquid flowing through a pressure feeding passage 24. While the flow rate Q and an intermittent supply period T are maintained at constant values, the time for which a solenoid ON-OFF valve 25 is opened by turning ON a pump 23; namely, the cleaning liquid supplying time t1, t2... is set to be long at the beginning stage, and is gradually shortened. In a second process, while the supplying time (t) and the intermittent supply period T are maintained at constant values, a throttle control valve 26 is automatically controlled to set the flow rates Q1, Q2... to be large at the beginning stage and be gradually reduced. In a third process, while the flow rate Q and the supplying time (t) are maintained at constant values, the intermittent supply period T is set to be short at the beginning stage and the gradually prolonged.
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