| 摘要 |
PURPOSE:To perform bonding operations under optimal conditions for improving productivity and quality of products, by controlling bonding pressures indenpendently and discriminately before and after bonding parts are contacted with each other and, after the parts are contacted, further controlling them independently and discriminately before and after the application of supersonic waves is started. CONSTITUTION:If a bonding tool 7 is lowered to a predetermined level, thrust F of a voice coil motor 10 is decreased from a set value of a rapidly lowering period T1 to a set value of a soft approaching period T2. As soon as the lower end of the bonding tool 7 reaches the surface to be bonded, the thrust F is raised to a next set value. After lapse of a period T3 the thrust F is lowered so as to provide a pressure suitable for the bonding operation. This output U is applied for a set period T4 to complete the first wire bonding operation. After another bonding tool 6 is lifted to a predetermined level, a larger thrust F is employed to start the next bonding opera tion. The thrust F is not changed for a soft approaching period T8 and, after a lapse of a period T9, the thrust F is increased so as to provide a pressure suitable for the bonding operation. This output U is applied for a set period T10 to complete the second bonding operation. |
