发明名称 |
CONFORMING CRUCIBLE/SUSCEPTOR SYSTEM FOR SILICON CRYSTAL GROWTH |
摘要 |
A crucible/susceptor system is described in which the walls of the crucible and the susceptor cavity are sloped outward in an angle sufficient for the force of gravity to exceed the inward pulling forces created by the high surface tension of molten silicon allowing the softened quartz crucible walls to settle into and form to the sloped walls of the susceptor thereby improving heat transfer from the susceptor to the molten silicon and improving the reproducibility of the system. |
申请公布号 |
AU1076488(A) |
申请公布日期 |
1988.08.11 |
申请号 |
AU19880010764 |
申请日期 |
1988.01.27 |
申请人 |
WESTINGHOUSE ELECTRIC CORP. |
发明人 |
PAUL ANTHONY PIOTROWSKI;EDGAR L. KOCHKA;CHARLES STUART DUNCAN |
分类号 |
C30B15/00;C30B15/10;C30B29/06 |
主分类号 |
C30B15/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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