发明名称 MONITOR DEVICE FOR CIRCULATING FILTER SYSTEM
摘要 PURPOSE:To monitor the circulating filter system having a pump, by providing a means for detecting the variations in the back pressure of the driving air for the air-driven pump and a means for generating the signal of the running speed of the pump. CONSTITUTION:The variations in the back pressure of the driving air for the air-driven pump 3 are measured and detected by the monitor device as the signal reflecting the operating condition of them circulating filter system. The device consists of a pressure sensor 15 as the means for outputting the detection signal and a signal generating means 24 for processing the detection signal outputted from the pressure sensor 15, calculating the running speed of the air-driven pump 3, namely the number of cycles per unit time, displaying the speed, and generating various signals based on the calculated number cycles. As a result, the circulating filter system having the air-driven pump 3 can be monitored.
申请公布号 JPS63194709(A) 申请公布日期 1988.08.11
申请号 JP19870025492 申请日期 1987.02.04
申请人 KURABO IND LTD 发明人 MIYAKE TAKAO;MAKIMOTO MICHIO
分类号 B01D37/04;F04B43/02;F04B43/06;H01L21/02 主分类号 B01D37/04
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