| 摘要 |
PURPOSE:To reduce difference in film thickness to be formed by providing a concentric-circular slit on the peripheral part of a susceptor to be leaded with a sample for unifying a surface temperature of the sample. CONSTITUTION:A susceptor 1 loaded with a sample 2 is held by a holding rod 5a the susceptor 1 is red-heated by high frequency inductive heating for holding the sample 2 at a prescribed temperature. At the time, the peripheral circular part not loaded with the sample 2 of the susceptor 1 is provided with four concentric-circular slits 1a. Then, radiation heat per unit area radiating from the peripheral surface parallel to the opposing sample 2 is reduced as compared with the case of no slit 1. As a result, difference in the surface temperature in the peripheral part and the central part of the sample 2 is compressed so as to reduce difference in film thickness to be formed.
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