| 摘要 |
PURPOSE:To form a synthesized inverted pattern readily, when image data are prepared according to design pattern data, by adding positive or negative flags and region setting data. CONSTITUTION:Design pattern data DA-DC for design patterns A-C are read through a magnetic tape reader 23 and put into a minicomputer 24. The data are converted into formats for divided regions (X1, Y1)-(X3, Y3). Flags for inverted images or positive images are added to the design pattern data of the inverted pattern or the non-inverted patterns. The design data for pattern forming regions are also added. The data are stored in a magnetic disk 25. The design pattern data of the divided region, which is one step further than the applicable divided region, are inputted into a raster conversion circuit 26 from the disk 25. A bit pattern is formed. Which of the positive image or the inverted image is used for drawing is determined based on flag information, and the result is inputted into a bit pattern memory 27. The output of the memory is compared with the data of a mask 32 in a circuit 31 for defect, comparison and judgement. |
