| 摘要 |
PURPOSE:To adjust a zero point simply, by forming a plurality of zero-point adjusting resistors, which are extended in the direction of the normal lines on the same circumference with the center of a gage part as the center, by using the same material, connecting the resistors in parallel, and trimming the resistors. CONSTITUTION:The gage part of the diaphragm of a thin film pressure sensor has a circular shape. First and third pressure sensitive resistor layer patterns R1 and R2, which are extended in the directions of the normal lines, are arranged at the peripheral part in a symmetrical pattern with respect to the center O. Second and fourth pressure sensitive resistor layer patterns R2 and R4, which are extended in the tangential direction, are arranged at the central part in a symmetrical pattern with respect to the center O by the similar way. Adjusting resistor patterns RM1-RMn and RN1-RNn are formed. After the sensor is completed, zero-point adjusting is performed and the adjusting resistor patterns are trimmed with laser.
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