| 摘要 |
PURPOSE:To rapidly measure the pH of an object to be detected having high impedance at high temp. of 100 deg.C or more, by forming the semiconductive membrane of a sensor part from In-Sn-O type oxide and forming in ion responsive membrane from Ta2O5, ZrO2, TiO2 or Al2O3. CONSTITUTION:Metal bodies 3a, 3b, 4a, 4b are provided in a container main body 1 and a ceramics plate 8 is mounted thereon and a pair of electrodes 9a, 9b are provided. A semiconductive membrane 10 composed of In-Sn-O oxide is provided on the ceramics plate 8 and coated with a SiO2 membrane 11. An ion sensitive membrane 12 formed of either one of Ta2O5, ZrO2 and Al2O3 is provided thereon to constitute a measuring apparatus. Then, the ion sensitive membrane 12 is brought into contact with an object to be detected and potential change is detected to measure pH. Since the sensitivity of a hydrogen ion and the stability to alkali are improved using the above-mentioned semiconductive membrane and the ion sensitive membrane, the pH of the high temp. object to be detected can be rapidly measured. |
