| 摘要 |
PURPOSE:To omit rolling parts and sliding parts and to prevent dust yielding at movable parts, by alternately expanding and contracting first and second piezoelectric elements, and transferring a wafer, which is mounted on a wafer transfer stage, in the horizontal direction. CONSTITUTION:When a first piezoelectric element 11 is elongated in the vertical direction and a wafer supporting stage 7 is moved upward, a wafer 5 is mounted on the wafer supporting stage 7 and separated from a transfer stage 8. When a second piezoelectric element 13 is contracted in the horizontal direction, the transfer stage 8 is moved leftward. The supporting stage 7 is moved downward by contracting the element 11, and the wafer 5 is mounted on the transfer stage 8. The element 13 is elongated, and the transfer stage 8 and the wafer 5 thereon are sent rightward. Thus a rolling part and a sliding part are omitted, and dust yielding from movable parts is eliminated. |
