发明名称 X-RAY GENERATING DEVICE
摘要 PURPOSE:To obtain high brightness X rays by disposing an X-ray reflector on at least one of optical paths of the X rays generated between electrodes and reflecting the X rays on the X-ray reflector and making the reflected X rays become incident to plasma being in its excited state and generating induc tive emission X rays. CONSTITUTION:A pair of facing electrodes 2 and 3 are disposed in a vacuum container, and one electrode 2 is connected with a capacitor 1 through a dis charge switch 4, and the other electrode 3 is also connected with the capacitor 1. An X-ray reflector 5 is disposed in the vicinity of the electrodes 2 and 3. When electrons of the capacitor 1 charged by a high voltage power source 6 are discharged between the electrodes 2 and 3 by the actuation of the dis charge switch 4, discharge plasma is generated between the electrodes 2 and 3 so that atoms in the plasma become excited. Thereupon, part of the X rays generated by natural emission are reflected on the X-ray reflector 5 so as to become X rays 7 incident between the electrodes 2 and 3. Hence, induction emission of X rays is realized from the plasma being in its excited state between the electrodes 2 and 3, so that high brightness X rays 8 can be obtained.
申请公布号 JPS63193445(A) 申请公布日期 1988.08.10
申请号 JP19870024560 申请日期 1987.02.06
申请人 HITACHI LTD 发明人 ARITA HIROSHI;SUGAWARA HIROYUKI;SUZUKI KOJI;KUROSAWA YUKIO
分类号 H01J35/22;H01L21/027;H01L21/30 主分类号 H01J35/22
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