摘要 |
PURPOSE:To expand a pressure measuring range and to enhance the sensitivity of a detector, by providing a protruding part, which almost fills the excessive space formed at the time of the max. compression of a pressure responding part and becomes a non-contact state with respect to the inner wall of the pressure responding part, to a base stand. CONSTITUTION:A detector 1 consists of a bellows cap 10 opened at one end and a base stand 3 having a columnar protruding part 32 and inserted in the cap 10 up to predetermined position and bonded thereto in an airtight sealing state. The cap 10 is composed of pressure receiving plate 12. bellows 11 expanding and contracting in response to external pressure and the non-responding part 13 bonded to the base stand 3. When the height of the pressure receiving plate 12 and the bellows 11 under reference pressure is set to (l), both of them are planned so that the height thereof becomes about l/2 at the time of the max. compression. When pressure is applied to this detector 1, the bellows 11 is compressed. Since the protruding part 32 is present, said protruding part 32 almost fills the excessive space generated by the thickness of the bellows 11 itself at the time of the max. compression and the internal space volume can be reduced to 1/5 or less that at the time of reference pressure. By this constitution, pressure higher 2.5 times or more can be measured with the same sensitivity as conventional one.
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