摘要 |
PURPOSE:To improve peak reflectivity by using rhodium (Rh) as the heavy element material of an X-ray spectral element of the artificial superlattice alternately laminated with the heavy element materials and light element materials. CONSTITUTION:This X-ray spectral element is constituted by forming rhodium (Rh) on the extreme surface layer on a coating substrate 3 consisting of a glass of silicon wafer, etc., then forming a thin layer of the 'light element material' such as carbon (C) or boron carbide (B4C) thereon. These thin layers are laminated in many layers. This element is improved in the peak reflectivity in spectral ray of a BeKalpha line (wavelength lambda=114Angstrom ), BKalpha line (wavelength lambda=67.6Angstrom ) and CKalpha line (wavelength lambda=44.7Angstrom ) in the case of analyzing beryllium (Be), boron (B) and carbon (C). |