发明名称 X-RAY SPECTRAL ELEMENT
摘要 PURPOSE:To improve peak reflectivity by using rhodium (Rh) as the heavy element material of an X-ray spectral element of the artificial superlattice alternately laminated with the heavy element materials and light element materials. CONSTITUTION:This X-ray spectral element is constituted by forming rhodium (Rh) on the extreme surface layer on a coating substrate 3 consisting of a glass of silicon wafer, etc., then forming a thin layer of the 'light element material' such as carbon (C) or boron carbide (B4C) thereon. These thin layers are laminated in many layers. This element is improved in the peak reflectivity in spectral ray of a BeKalpha line (wavelength lambda=114Angstrom ), BKalpha line (wavelength lambda=67.6Angstrom ) and CKalpha line (wavelength lambda=44.7Angstrom ) in the case of analyzing beryllium (Be), boron (B) and carbon (C).
申请公布号 JPS63191951(A) 申请公布日期 1988.08.09
申请号 JP19870023788 申请日期 1987.02.04
申请人 JEOL LTD 发明人 KAWABE KAZUYASU
分类号 G01N23/22;G21K1/06 主分类号 G01N23/22
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