Thermochemical surface treatments of materials in a reactive gas plasma

摘要

A method for the thermochemical surface treatment of workpieces in a reactive gas plasma is disclosed in which an appreciable reduction in the amount of reactive gas and energy used is achieved by working at gas pressures below 10 pascals (Pa). Particularly advantageous results are achieved with a low-voltage electrical arc discharge, which leads to an ionization of the gases used (about 50%) that is substantially higher than that, which is achieved with the methods described in the art 6 (approximately 1%). Surfaces, treated by such a conduct of the reaction, are distinguished by an increased hardness and better wear properties. The method of the invention moreover allows more numerous variation possibilities than do the methods described in the art and enables the conduct of the method to be adapted in a flexible manner to the specific requirements of the particular case. The inventive method permits a time sequence of the several treatment steps with different reactive gases or gas mixtures and thus a combination of different foreign elements in the treated substrate surface.