| 摘要 |
PURPOSE:To increase hardness of the surface of a stamper, and to improve the durability of the stamper due to the increase in the lapse of time in hardness by heating at the time of forming, by forming a metallic film having an age hardening property, on the surface of the stamper. CONSTITUTION:On the surface of an optically polished glass plate 1 of 200mmphi and 6mm thickness, a positive resist 2 is formed to thickness of about 1,200Angstrom by spin coating. Subsequently, a laser beam modulated by a PCM audio signal of compact disk specifications is radiated by a laser beam cutting machine. A photoresist is sensitized, and thereafter, developed and the photoresist is removed selectively. Next, silver 3 is sputtered by 400Angstrom to this glass plate 1 and an electric conduction processing is executed, and thereafter, under a prescribed bath composition condition, Ni-P plating is executed for 15min. This plating thickness is set to 5-8mu, and thereafter, immediately sulfamic acid nickel electroforming 4 is executed and it is formed to thickness of about 300M. Next, it is peeled off from the glass substrate 1, reverse side polishing and working of the inside and outside diameters and silver on the surface is peeled off, by which a stamper for a compact disk is obtained.
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